Enhancing Wafer Quality with Advanced AOI Technology

In the ever-evolving landscape of semiconductor manufacturing, the relentless drive for innovation is met with a significant challenge: the shrinking size of wafers. As wafer sizes diminish, the intricacies of inspection become increasingly complex, amplifying the risk of defects and cracks, particularly after the sawing process. In response to these challenges, the imperative for post-saw inspection is underscored, making Automated Optical Inspection (AOI) an indispensable component of the semiconductor production process.

Recognizing the critical need for precise defect detection and reliable inspection solutions, Cortex proudly presents the Alpha series, a groundbreaking advancement in semiconductor defect inspection. Engineered with cutting-edge technology, the Alpha series revolutionizes the way wafers are inspected, offering unparalleled accuracy and efficiency.

At the core of the Alpha series is its high-performance Wafer AOI solutions, meticulously designed to automatically detect major and minor defects with unmatched precision. Whether pre or post-sawing, the Alpha series ensures comprehensive defect inspection, safeguarding the integrity of semiconductor wafers across various industries including semiconductor, electronics, automotive, medical, and optoelectronics.

Key to the success of the Alpha series is its ability to cater to a diverse range of wafer sizes, from 6″ to 12″, while maintaining an exceptional defect detection capability of 0.5 um. This level of precision is further augmented by the Fine Die Inspect feature, enabling scrutiny of die dimensions as small as 300umX300um.

The Alpha series boasts an array of advanced features that elevate the inspection process to unprecedented levels of efficiency and reliability. With its Auto Lens Change Feature, the series provides flexibility in magnification inspection without necessitating hardware changes, streamlining the inspection workflow. The Real-Time & High-Speed Autofocus Feature tackles wafer warp issues head-on, ensuring consistent, high-resolution image capture.

Moreover, the Alpha series boasts the ability to proceed with inspection despite missing die rows or in die shedding conditions, thanks to its robust design and advanced software algorithms. This ensures that no defect goes unnoticed, contributing to enhanced overall quality and yield. The inclusion of features such as Host Map format Adaptability, HEPA filters, Live Results Display, and Auto Mapping further enhances usability and convenience in the manufacturing environment.

In terms of defect detection, the Alpha series leaves no stone unturned, identifying a myriad of issues including cracks, chipping, meandering, and un-separation. For added versatility, optional defect detection functionalities include scratch, stain, measuring, discoloration, foreign material detection, Optical Character Recognition (OCR), and more.

As a testament to Cortex’s commitment to innovation, the Alpha series has been further enhanced with SWIR (Short-Wave Infrared) technology. This groundbreaking addition enables inspection of die inner layer and sidewall defects, bolstering the series’ capability to deliver uncompromising quality assurance.

In conclusion, the Alpha series stands as a beacon of excellence in semiconductor defect inspection, setting new benchmarks for accuracy, reliability, and efficiency. By leveraging advanced AOI technology, Cortex has not only addressed the pressing needs of the semiconductor industry but has also empowered manufacturers to achieve unparalleled levels of quality assurance, ensuring the integrity and reliability of semiconductor wafers in an increasingly competitive landscape.